Semiconductor wafer cooling device in a long time in the process of use, but also need to semiconductor wafer cooling device for the necessary checks and maintenance, regular maintenance is conducive to semiconductor wafer cooling device cooling efficiency, but also conducive to the extension of life.

1, check and correct the semiconductor wafer cooling device thermostat,wafer tester ensure that the thermostat normal display.

2, check the semiconductor wafer cooling device refrigerant amount, if not enough, need to supplement the refrigerant in time.

3, the semiconductor wafer cooling device of the entire electronic control system, the host circuit system to do a thorough check to ensure normal.

4, test run and total correction, test whether the degree of overheating is normal, each component has no abnormal sound.

5, cleaning semiconductor wafer cooling device condenser / evaporator, if the water quality is not too bad, it is recommended that the cumulative operation of a half-year cleaning. Semiconductor wafer cooling device in the long run, there will be a lot of water impurities, will affect the cooling effect and service life.

6, check the refrigeration oil and lubricating oil system, if contamination is recommended for its replacement,wafer probe testing in order to facilitate the compressor to run more freely.

7, the semiconductor wafer cooling device compressor motor coil test.

8, check and correct the semiconductor wafer cooling device of high and low pressure switch to determine the high and low pressure in the normal range.

9, check whether the filter drier is normal, there is no blockage, if necessary, should be replaced with a new filter drier.

10, regularly check the electrical connections and lines of the cooling device to ensure that there is no looseness or damage.

11, pay attention to observe the operation status of the cooling device,vibration isolation table if any abnormalities in a timely manner to avoid the expansion of the fault.

12、Keep the environment around the cooling device clean to avoid dust and debris from entering the inside of the device.

13, follow the operation manual in the use and maintenance requirements, do not arbitrarily change the equipment settings or parameters.

14, regular maintenance and repair of the equipment, including the replacement of worn parts and lubrication system.

15、For cooling devices that are not used for a long time, they should be cleaned and properly stored to avoid damage or corrosion.